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Endpoint detection of Ge"2Sb"2Te"5 during chemical mechanical planarization

He, A. / Liu, B. / Song, Z. / Liu, W. / Lu, Y. / Wang, L. / Wu, G. / Feng, S.

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Endpoint detection of Ge"2Sb"2Te"5 during chemical mechanical planarization

He, A. / Liu, B. / Song, Z. / Liu, W. / Lu, Y. / Wang, L. / Wu, G. / Feng, S.

Endpoint detection of Ge"2Sb"2Te"5 during chemical mechanical planarization

He, A. / Liu, B. / Song, Z. / Liu, W. / Lu, Y. / Wang, L. / Wu, G. / Feng, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Endpoint detection of Ge"2Sb"2Te"5 during chemical mechanical planarization

Contributors:

He, A. (author) / Liu, B. (author) / Song, Z. (author) / Liu, W. (author) / Lu, Y. (author) / Wang, L. (author) / Wu, G. (author) / Feng, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 283 ; 304-308

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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