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Epitaxial growth and electrical properties of ultrathin La"2Hf"2O"7 high-k gate dielectric films
Epitaxial growth and electrical properties of ultrathin La"2Hf"2O"7 high-k gate dielectric films
Epitaxial growth and electrical properties of ultrathin La"2Hf"2O"7 high-k gate dielectric films
Xiong, Y. H. (author) / Tu, H. L. (author) / Du, J. (author) / Wei, F. (author) / Zhang, X. Q. (author) / Yang, M. M. (author) / Zhao, H. B. (author) / Chen, D. P. (author) / Wang, W. W. (author)
APPLIED SURFACE SCIENCE ; 283 ; 554-558
2013-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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