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Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
Zhang, J. (author) / Yang, H. (author) / Zhang, Q. l. (author) / Dong, S. (author) / Luo, J. K. (author)
APPLIED SURFACE SCIENCE ; 282 ; 390-395
2013-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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