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    XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

    New search for: Motamedi, P.
    New search for: Cadien, K.

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    XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

    New search for: Motamedi, P.
    New search for: Cadien, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

    New search for: Motamedi, P.
    New search for: Cadien, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition

    Contributors:

    Motamedi, P. (author) / Cadien, K. (author)

    Published in:

    Applied surface science ; 315 ; 104-109

    Publication date:

    2014-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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