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Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Zhang, Jian (author) / Zhang, Qilong (author) / Yang, Hui (author) / Wu, Huayu (author) / Zhou, Juehui (author) / Hu, Liang (author)
Applied surface science ; 315 ; 110-115
2014-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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