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Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
APPLIED SURFACE SCIENCE ; 315 ; 110-115
2014-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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