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Chemically enhanced synergistic wear: A copper chemical mechanical polishing case study

Nolan, L. M. / Cadien, K. C.

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Chemically enhanced synergistic wear: A copper chemical mechanical polishing case study

Nolan, L. M. / Cadien, K. C.

Chemically enhanced synergistic wear: A copper chemical mechanical polishing case study

Nolan, L. M. / Cadien, K. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemically enhanced synergistic wear: A copper chemical mechanical polishing case study

Contributors:

Nolan, L. M. (author) / Cadien, K. C. (author)

Published in:

WEAR -LAUSANNE- ; 307 ; 155-163

Publication date:

2013-01-01

Size:

9 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11292

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