Characterization of the Defect Evolution in Thick Heavily Al-Doped 4H-SiC Epilayers: Fid-Bau Portal

Characterization of the Defect Evolution in Thick Heavily Al-Doped 4H-SiC Epilayers

Ji, S.Y. / Kojima, K. / Ishida, Y. / Yamaguchi, H. / Saito, S. / Kato, T. / Tsuchida, H. / Yoshida, S. / Okumura, H.

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Characterization of the Defect Evolution in Thick Heavily Al-Doped 4H-SiC Epilayers

Ji, S.Y. / Kojima, K. / Ishida, Y. / Yamaguchi, H. / Saito, S. / Kato, T. / Tsuchida, H. / Yoshida, S. / Okumura, H.

Characterization of the Defect Evolution in Thick Heavily Al-Doped 4H-SiC Epilayers

Ji, S.Y. / Kojima, K. / Ishida, Y. / Yamaguchi, H. / Saito, S. / Kato, T. / Tsuchida, H. / Yoshida, S. / Okumura, H.

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Title:

Characterization of the Defect Evolution in Thick Heavily Al-Doped 4H-SiC Epilayers

Contributors:

Ji, S.Y. (author) / Kojima, K. (author) / Ishida, Y. (author) / Yamaguchi, H. (author) / Saito, S. (author) / Kato, T. (author) / Tsuchida, H. (author) / Yoshida, S. (author) / Okumura, H. (author) / Okumura, H.

Published in:

Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 151-154

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ji, S.Y. / Kojima, K. / Ishida, Y. et al. | British Library Online Contents | 2013

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Lebedev, A. A. / Strokan, N. B. / Ivanov, A. M. et al. | British Library Online Contents | 2001

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Ostheimer, V. / Filz, T. / Hamann, J. et al. | British Library Online Contents | 1997

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