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Photoluminescence Imaging and Discrimination of Threading Dislocations in 4H-SiC Epilayers
Photoluminescence Imaging and Discrimination of Threading Dislocations in 4H-SiC Epilayers
Photoluminescence Imaging and Discrimination of Threading Dislocations in 4H-SiC Epilayers
Nagano, M. (author) / Kamata, I. (author) / Tsuchida, H. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M. / Watanabe, H. / Hatayama, T. / Matsuura, H.
2014-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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