Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots: Fid-Bau Portal

Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots

Liu, J. / Huda, M. / Mohamad, Z.b. / Zhang, H. / Yin, Y. / Hosaka, S.

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Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots

Liu, J. / Huda, M. / Mohamad, Z.b. / Zhang, H. / Yin, Y. / Hosaka, S.

Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots

Liu, J. / Huda, M. / Mohamad, Z.b. / Zhang, H. / Yin, Y. / Hosaka, S.

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Title:

Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots

Contributors:

Liu, J. (author) / Huda, M. (author) / Mohamad, Z.b. (author) / Zhang, H. (author) / Yin, Y. (author) / Hosaka, S. (author) / Hosaka, S.

Published in:

Advanced Micro-Device Engineering IV ; 88-91

KEY ENGINEERING MATERIALS ; 596

Publication date:

2014-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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