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    Study on the Machining Parameters in Polishing Single-Crystal SiC Wafers with SG Films

    New search for: Du, Z.
    New search for: Lu, J.
    New search for: Fang, C.F.
    New search for: Huang, H.
    New search for: Xu, X.P.
    New search for: Xu, X.
    New search for: Huang, C.
    New search for: Zuo, D.
    New search for: Chen, M.

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    Study on the Machining Parameters in Polishing Single-Crystal SiC Wafers with SG Films

    New search for: Du, Z.
    New search for: Lu, J.
    New search for: Fang, C.F.
    New search for: Huang, H.
    New search for: Xu, X.P.
    New search for: Xu, X.
    New search for: Huang, C.
    New search for: Zuo, D.
    New search for: Chen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on the Machining Parameters in Polishing Single-Crystal SiC Wafers with SG Films

    New search for: Du, Z.
    New search for: Lu, J.
    New search for: Fang, C.F.
    New search for: Huang, H.
    New search for: Xu, X.P.
    New search for: Xu, X.
    New search for: Huang, C.
    New search for: Zuo, D.
    New search for: Chen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study on the Machining Parameters in Polishing Single-Crystal SiC Wafers with SG Films

    Contributors:

    Du, Z. (author) / Lu, J. (author) / Fang, C.F. (author) / Huang, H. (author) / Xu, X.P. (author) / Xu, X. / Huang, C. / Zuo, D. / Chen, M.

    Published in:

    Advances in Machining and Manufacturing Technology XII ; 457-463

    KEY ENGINEERING MATERIALS ; 589/590

    Publication date:

    2014-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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