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Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide

Eigenfeld, N. T. / Gray, J. M. / Brown, J. J. / Skidmore, G. D. / George, S. M. / Bright, V. M.

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Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide

Eigenfeld, N. T. / Gray, J. M. / Brown, J. J. / Skidmore, G. D. / George, S. M. / Bright, V. M.

Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide

Eigenfeld, N. T. / Gray, J. M. / Brown, J. J. / Skidmore, G. D. / George, S. M. / Bright, V. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide

Contributors:

Eigenfeld, N. T. (author) / Gray, J. M. (author) / Brown, J. J. (author) / Skidmore, G. D. (author) / George, S. M. (author) / Bright, V. M. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 26 ; 3962-3967

Publication date:

2014-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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