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    Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

    New search for: Shi, Fengfeng
    New search for: Han, Jun
    New search for: Xing, Yanhui
    New search for: Li, Junshuai
    New search for: Zhang, Li
    New search for: He, Tao
    New search for: Li, Tao
    New search for: Deng, Xuguang
    New search for: Zhang, Xiaodong
    New search for: Zhang, Baoshun

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    Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

    New search for: Shi, Fengfeng
    New search for: Han, Jun
    New search for: Xing, Yanhui
    New search for: Li, Junshuai
    New search for: Zhang, Li
    New search for: He, Tao
    New search for: Li, Tao
    New search for: Deng, Xuguang
    New search for: Zhang, Xiaodong
    New search for: Zhang, Baoshun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

    New search for: Shi, Fengfeng
    New search for: Han, Jun
    New search for: Xing, Yanhui
    New search for: Li, Junshuai
    New search for: Zhang, Li
    New search for: He, Tao
    New search for: Li, Tao
    New search for: Deng, Xuguang
    New search for: Zhang, Xiaodong
    New search for: Zhang, Baoshun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition

    Contributors:

    Shi, Fengfeng (author) / Han, Jun (author) / Xing, Yanhui (author) / Li, Junshuai (author) / Zhang, Li (author) / He, Tao (author) / Li, Tao (author) / Deng, Xuguang (author) / Zhang, Xiaodong (author) / Zhang, Baoshun (author)

    Published in:

    MATERIALS LETTERS ; 237 ; 105-108

    Publication date:

    2019-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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