Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor: Fid-Bau Portal

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Mai, L. / Giedraityte, Z. / Schmidt, M. / Rogalla, D. / Scholz, S. / Wieck, A. D. / Devi, A. / Karppinen, M.

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Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Mai, L. / Giedraityte, Z. / Schmidt, M. / Rogalla, D. / Scholz, S. / Wieck, A. D. / Devi, A. / Karppinen, M.

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Mai, L. / Giedraityte, Z. / Schmidt, M. / Rogalla, D. / Scholz, S. / Wieck, A. D. / Devi, A. / Karppinen, M.

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Check availability in my library

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Document information

Title:

Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Contributors:

Mai, L. (author) / Giedraityte, Z. (author) / Schmidt, M. (author) / Rogalla, D. (author) / Scholz, S. (author) / Wieck, A. D. (author) / Devi, A. (author) / Karppinen, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 52 ; 6216-6224

Publication date:

2017-01-01

Size:

9 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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