Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon: Fid-Bau Portal

Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon

Wang, C. W. / Yiu, P. / Chu, J. P. / Shek, C. H. / Hsueh, C. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon

Wang, C. W. / Yiu, P. / Chu, J. P. / Shek, C. H. / Hsueh, C. H.

Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon

Wang, C. W. / Yiu, P. / Chu, J. P. / Shek, C. H. / Hsueh, C. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Zr–Ti–Ni thin film metallic glass as a diffusion barrier between copper and silicon

Contributors:

Wang, C. W. (author) / Yiu, P. (author) / Chu, J. P. (author) / Shek, C. H. (author) / Hsueh, C. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 50 ; 2085-2092

Publication date:

2015-01-01

Size:

8 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Hata, S. / Yamauchi, R. / Sakurai, J. et al. | British Library Online Contents | 2008

Diffusion barrier properties of ionized metal plasma deposited tantalum nitride thin films between copper and silicon dioxide

Latt, K. M. / Lee, Y. K. / Seng, H. L. et al. | British Library Online Contents | 2001

Barrier performance of ultrathin amorphous Nb–Ni film between copper and silicon

Dai, X. H. / Zhang, L. / Feng, Z. D. et al. | British Library Online Contents | 2015

The role of oxygen in the deposition of copper-calcium thin film as diffusion barrier for copper metallization

Yu, Z. / Ren, R. / Xue, J. et al. | British Library Online Contents | 2015

Copper diffusion barrier performance of amorphous Ta-Ni thin films

Yan, H. / Tay, Y. Y. / Jiang, Y. et al. | British Library Online Contents | 2012