Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon: Fid-Bau Portal

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Catena, A. / McJunkin, T. / Agnello, S. / Gelardi, F. M. / Wehner, S. / Fischer, C. B.

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Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Catena, A. / McJunkin, T. / Agnello, S. / Gelardi, F. M. / Wehner, S. / Fischer, C. B.

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Catena, A. / McJunkin, T. / Agnello, S. / Gelardi, F. M. / Wehner, S. / Fischer, C. B.

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Check availability in my library

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Document information

Title:

Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C:H) on silicon

Contributors:

Catena, A. (author) / McJunkin, T. (author) / Agnello, S. (author) / Gelardi, F. M. (author) / Wehner, S. (author) / Fischer, C. B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 347 ; 657-667

Publication date:

2015-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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