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Stabilized copper plating method by programmed electroplated current: Accumulation of densely packed copper grains in the interconnect
Stabilized copper plating method by programmed electroplated current: Accumulation of densely packed copper grains in the interconnect
Stabilized copper plating method by programmed electroplated current: Accumulation of densely packed copper grains in the interconnect
Kao, L. C. (author) / Hsu, L. H. (author) / Brahma, S. (author) / Huang, B. C. (author) / Liu, C. C. (author) / Lo, K. Y. (author)
APPLIED SURFACE SCIENCE ; 388 ; 228-233
2016-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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