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    Structural, optical and dielectric properties of HfSiO films prepared by co-evaporation method

    New search for: Yang, Chen
    New search for: Hang, Lingxia
    New search for: Xu, Junqi

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    Structural, optical and dielectric properties of HfSiO films prepared by co-evaporation method

    New search for: Yang, Chen
    New search for: Hang, Lingxia
    New search for: Xu, Junqi

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural, optical and dielectric properties of HfSiO films prepared by co-evaporation method

    New search for: Yang, Chen
    New search for: Hang, Lingxia
    New search for: Xu, Junqi

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structural, optical and dielectric properties of HfSiO films prepared by co-evaporation method

    Contributors:

    Yang, Chen (author) / Hang, Lingxia (author) / Xu, Junqi (author)

    Published in:

    Materials science in semiconductor processing ; 29 ; 321-325

    Publication date:

    2015-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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