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The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique
The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique
The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique
Kim, Doyoung (author) / Kim, Soo-Hyun (author) / Kim, Hyungjun (author)
Materials science in semiconductor processing ; 29 ; 139-142
2015-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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