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Defect evolution and dopant activation in laser annealed Si and Ge

Cristiano, F. / Shayesteh, M. / Duffy, R. / Huet, K. / Mazzamuto, F. / Qiu, Y. / Quillec, M. / Henrichsen, H.H. / Nielsen, P.F. / Petersen, D.H. / ... [more]

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Defect evolution and dopant activation in laser annealed Si and Ge

Cristiano, F. / Shayesteh, M. / Duffy, R. / Huet, K. / Mazzamuto, F. / Qiu, Y. / Quillec, M. / Henrichsen, H.H. / Nielsen, P.F. / Petersen, D.H. / ... [more]

Defect evolution and dopant activation in laser annealed Si and Ge

Cristiano, F. / Shayesteh, M. / Duffy, R. / Huet, K. / Mazzamuto, F. / Qiu, Y. / Quillec, M. / Henrichsen, H.H. / Nielsen, P.F. / Petersen, D.H. / ... [more]

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Title:

Defect evolution and dopant activation in laser annealed Si and Ge

Contributors:

Cristiano, F. (author) / Shayesteh, M. (author) / Duffy, R. (author) / Huet, K. (author) / Mazzamuto, F. (author) / Qiu, Y. (author) / Quillec, M. (author) / Henrichsen, H.H. (author) / Nielsen, P.F. (author) / Petersen, D.H. (author)

Published in:

Materials science in semiconductor processing ; 42 ; 188-195

Publication date:

2016-01-01

Size:

8 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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