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    Strain evolution of SiGe-on-insulator fabricated by germanium condensation method with over-oxidation

    New search for: Lin, Guangyang
    New search for: Lan, Xiaoling
    New search for: Chen, Ningli
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    Strain evolution of SiGe-on-insulator fabricated by germanium condensation method with over-oxidation

    New search for: Lin, Guangyang
    New search for: Lan, Xiaoling
    New search for: Chen, Ningli
    New search for: Li, Cheng
    New search for: Huang, Donglin
    New search for: Chen, Songyan
    New search for: Huang, Wei
    New search for: Xu, Jianfang
    New search for: Lai, Hongkai

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Strain evolution of SiGe-on-insulator fabricated by germanium condensation method with over-oxidation

    New search for: Lin, Guangyang
    New search for: Lan, Xiaoling
    New search for: Chen, Ningli
    New search for: Li, Cheng
    New search for: Huang, Donglin
    New search for: Chen, Songyan
    New search for: Huang, Wei
    New search for: Xu, Jianfang
    New search for: Lai, Hongkai

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Strain evolution of SiGe-on-insulator fabricated by germanium condensation method with over-oxidation

    Contributors:

    Lin, Guangyang (author) / Lan, Xiaoling (author) / Chen, Ningli (author) / Li, Cheng (author) / Huang, Donglin (author) / Chen, Songyan (author) / Huang, Wei (author) / Xu, Jianfang (author) / Lai, Hongkai (author)

    Published in:

    Materials science in semiconductor processing ; 56 ; 282-286

    Publication date:

    2016-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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