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    Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation

    New search for: Boureau, Victor
    New search for: Benoit, Daniel
    New search for: Warot, Bénédicte
    New search for: Hÿtch, Martin
    New search for: Claverie, Alain

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    Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation

    New search for: Boureau, Victor
    New search for: Benoit, Daniel
    New search for: Warot, Bénédicte
    New search for: Hÿtch, Martin
    New search for: Claverie, Alain

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation

    New search for: Boureau, Victor
    New search for: Benoit, Daniel
    New search for: Warot, Bénédicte
    New search for: Hÿtch, Martin
    New search for: Claverie, Alain

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation

    Contributors:

    Boureau, Victor (author) / Benoit, Daniel (author) / Warot, Bénédicte (author) / Hÿtch, Martin (author) / Claverie, Alain (author)

    Published in:

    Materials science in semiconductor processing ; 42 ; 251-254

    Publication date:

    2016-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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