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Ge-on-insulator wafer with ultralow defect density fabricated by direct condensation of SiGe-on-insulator structure
Ge-on-insulator wafer with ultralow defect density fabricated by direct condensation of SiGe-on-insulator structure
Ge-on-insulator wafer with ultralow defect density fabricated by direct condensation of SiGe-on-insulator structure
Ye, Lin (author) / Zhang, Miao (author) / Xue, Zhongyin (author) / Yang, Jianhong (author) / Wang, Xi (author) / Di, Zengfeng (author)
Applied surface science ; 356 ; 1052-1057
2015-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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