A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
High power impulse magnetron sputtered p-type γ-titanium monoxide films: Effects of substrate bias and post-annealing on microstructure characteristics and optoelectrical properties
High power impulse magnetron sputtered p-type γ-titanium monoxide films: Effects of substrate bias and post-annealing on microstructure characteristics and optoelectrical properties
High power impulse magnetron sputtered p-type γ-titanium monoxide films: Effects of substrate bias and post-annealing on microstructure characteristics and optoelectrical properties
Peng, Wu-Chang (author) / Chen, Ying-Hung (author) / Chen, Jing-Yu (author) / He, Ju-Liang (author) / Wuu, Dong-Sing (author)
Materials science in semiconductor processing ; 61 ; 85-92
2017-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
| British Library Online Contents | 2000
Effect of substrate bias and temperature on magnetron sputtered CrSiN films
| British Library Online Contents | 2011
| British Library Online Contents | 2015
| British Library Online Contents | 2015
| British Library Online Contents | 2014