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Laser thermal processing using an optical coating for ultra shallow junction formation

Hernandez, M. / Venturini, J. / Berard, D. / Kerrien, G. / Sarnet, T. / Debarre, D. / Boulmer, J. / Laviron, C. / Camel, D. / Santailler, J. L.

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Laser thermal processing using an optical coating for ultra shallow junction formation

Hernandez, M. / Venturini, J. / Berard, D. / Kerrien, G. / Sarnet, T. / Debarre, D. / Boulmer, J. / Laviron, C. / Camel, D. / Santailler, J. L.

Laser thermal processing using an optical coating for ultra shallow junction formation

Hernandez, M. / Venturini, J. / Berard, D. / Kerrien, G. / Sarnet, T. / Debarre, D. / Boulmer, J. / Laviron, C. / Camel, D. / Santailler, J. L.

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Check availability in my library

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Document information

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Document information

Title:

Laser thermal processing using an optical coating for ultra shallow junction formation

Contributors:

Hernandez, M. (author) / Venturini, J. (author) / Berard, D. (author) / Kerrien, G. (author) / Sarnet, T. (author) / Debarre, D. (author) / Boulmer, J. (author) / Laviron, C. (author) / Camel, D. (author) / Santailler, J. L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 105-108

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Jain, A. | British Library Online Contents | 2008

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Hernandez, M. / Venturini, J. / Zahorski, D. et al. | British Library Online Contents | 2003

Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing

Jung, Sang Min / Park, Chul Jin / Jeong, Hongsik et al. | British Library Online Contents | 2017

Effect of number of laser pulses on p+/n silicon ultra-shallow junction formation during non-melt ultra-violet laser thermal annealing

Jung, Sang Min / Park, Chul Jin / Jeong, Hongsik et al. | British Library Online Contents | 2017

Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. et al. | British Library Online Contents | 2003