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Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Hernandez, M. / Venturini, J. / Zahorski, D. / Boulmer, J. / Debarre, D. / Kerrien, G. / Sarnet, T. / Laviron, C. / Semeria, M. N. / Camel, D.

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Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Hernandez, M. / Venturini, J. / Zahorski, D. / Boulmer, J. / Debarre, D. / Kerrien, G. / Sarnet, T. / Laviron, C. / Semeria, M. N. / Camel, D.

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Hernandez, M. / Venturini, J. / Zahorski, D. / Boulmer, J. / Debarre, D. / Kerrien, G. / Sarnet, T. / Laviron, C. / Semeria, M. N. / Camel, D.

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Document information

Title:

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Contributors:

Hernandez, M. (author) / Venturini, J. (author) / Zahorski, D. (author) / Boulmer, J. (author) / Debarre, D. (author) / Kerrien, G. (author) / Sarnet, T. (author) / Laviron, C. (author) / Semeria, M. N. (author) / Camel, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 345-351

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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