Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles: Fid-Bau Portal

Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Uprety, Prakash / Macco, Bart / Junda, Maxwell M. / Grice, Corey R. / Kessels, Wilhelmus M.M. / Podraza, Nikolas J.

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Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Uprety, Prakash / Macco, Bart / Junda, Maxwell M. / Grice, Corey R. / Kessels, Wilhelmus M.M. / Podraza, Nikolas J.

Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Uprety, Prakash / Macco, Bart / Junda, Maxwell M. / Grice, Corey R. / Kessels, Wilhelmus M.M. / Podraza, Nikolas J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Contributors:

Uprety, Prakash (author) / Macco, Bart (author) / Junda, Maxwell M. (author) / Grice, Corey R. (author) / Kessels, Wilhelmus M.M. (author) / Podraza, Nikolas J. (author)

Published in:

Materials science in semiconductor processing ; 84 ; 91-100

Publication date:

2018-01-01

Size:

10 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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