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    Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

    New search for: Kim, Kangsik
    New search for: Oh, Il-Kwon
    New search for: Kim, Hyungjun
    New search for: Lee, Zonghoon

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    Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

    New search for: Kim, Kangsik
    New search for: Oh, Il-Kwon
    New search for: Kim, Hyungjun
    New search for: Lee, Zonghoon

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

    New search for: Kim, Kangsik
    New search for: Oh, Il-Kwon
    New search for: Kim, Hyungjun
    New search for: Lee, Zonghoon

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

    Contributors:

    Kim, Kangsik (author) / Oh, Il-Kwon (author) / Kim, Hyungjun (author) / Lee, Zonghoon (author)

    Published in:

    Applied surface science ; 425 ; 781-787

    Publication date:

    2017-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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