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    Very high frequency plasma reactant for atomic layer deposition

    New search for: Oh, Il-Kwon
    New search for: Yoo, Gilsang
    New search for: Yoon, Chang Mo
    New search for: Kim, Tae Hyung
    New search for: Yeom, Geun Young
    New search for: Kim, Kangsik
    New search for: Lee, Zonghoon
    New search for: Jung, Hanearl
    New search for: Lee, Chang Wan
    New search for: Kim, Hyungjun
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    Very high frequency plasma reactant for atomic layer deposition

    New search for: Oh, Il-Kwon
    New search for: Yoo, Gilsang
    New search for: Yoon, Chang Mo
    New search for: Kim, Tae Hyung
    New search for: Yeom, Geun Young
    New search for: Kim, Kangsik
    New search for: Lee, Zonghoon
    New search for: Jung, Hanearl
    New search for: Lee, Chang Wan
    New search for: Kim, Hyungjun
    New search for: Lee, Han-Bo-Ram

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Very high frequency plasma reactant for atomic layer deposition

    New search for: Oh, Il-Kwon
    New search for: Yoo, Gilsang
    New search for: Yoon, Chang Mo
    New search for: Kim, Tae Hyung
    New search for: Yeom, Geun Young
    New search for: Kim, Kangsik
    New search for: Lee, Zonghoon
    New search for: Jung, Hanearl
    New search for: Lee, Chang Wan
    New search for: Kim, Hyungjun
    New search for: Lee, Han-Bo-Ram

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Very high frequency plasma reactant for atomic layer deposition

    Contributors:

    Oh, Il-Kwon (author) / Yoo, Gilsang (author) / Yoon, Chang Mo (author) / Kim, Tae Hyung (author) / Yeom, Geun Young (author) / Kim, Kangsik (author) / Lee, Zonghoon (author) / Jung, Hanearl (author) / Lee, Chang Wan (author) / Kim, Hyungjun (author)

    Published in:

    Applied surface science ; 387 ; 109-117

    Publication date:

    2016-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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