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    Tensile strain ultra thin body SiGe on insulator through hetero-layer transfer technique

    New search for: Chang, Wen Hsin
    New search for: Hattori, Hiroyuki
    New search for: Ishii, Hiroyuki
    New search for: Irisawa, Toshifumi
    New search for: Uchida, Noriyuki
    New search for: Maeda, Tatsuro

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    Tensile strain ultra thin body SiGe on insulator through hetero-layer transfer technique

    New search for: Chang, Wen Hsin
    New search for: Hattori, Hiroyuki
    New search for: Ishii, Hiroyuki
    New search for: Irisawa, Toshifumi
    New search for: Uchida, Noriyuki
    New search for: Maeda, Tatsuro

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Tensile strain ultra thin body SiGe on insulator through hetero-layer transfer technique

    New search for: Chang, Wen Hsin
    New search for: Hattori, Hiroyuki
    New search for: Ishii, Hiroyuki
    New search for: Irisawa, Toshifumi
    New search for: Uchida, Noriyuki
    New search for: Maeda, Tatsuro

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Tensile strain ultra thin body SiGe on insulator through hetero-layer transfer technique

    Contributors:

    Chang, Wen Hsin (author) / Hattori, Hiroyuki (author) / Ishii, Hiroyuki (author) / Irisawa, Toshifumi (author) / Uchida, Noriyuki (author) / Maeda, Tatsuro (author)

    Published in:

    Materials science in semiconductor processing ; 70 ; 123-126

    Publication date:

    2017-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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