Atomic layer deposition and post-growth thermal annealing of ultrathin MoO3 layers on silicon substrates: Formation of surface nanostructures

Liu, Hongfei / Yang, Ren Bin / Yang, Weifeng et al. | British Library Online Contents | 2018

Effects of post-deposition rapid thermal annealing on aluminum-doped ZnO thin films grown by atomic layer deposition

Cheng, Y. C. | British Library Online Contents | 2011

Annealing of ultrathin silicon dioxide layers plasma oxidized in ultrahigh vacuum

Majamaa, T. / Kilpela, O. / Novikov, S. et al. | British Library Online Contents | 1999

Effects of ultrathin layers on the growth of vertically aligned wurtzite ZnO nanostructures on perovskite single-crystal substrates

Liang, Y. C. / Hu, C. Y. / Zhong, H. | British Library Online Contents | 2012

Surface modification and fabrication of 3D nanostructures by atomic layer deposition

Bae, C. / Shin, H. / Nielsch, K. | British Library Online Contents | 2011