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    Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

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    Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

    New search for: Schilirò, Emanuela
    New search for: Giannazzo, Filippo
    New search for: Bongiorno, Corrado
    New search for: Di Franco, Salvatore
    New search for: Greco, Giuseppe
    New search for: Roccaforte, Fabrizio
    New search for: Prystawko, Pawel
    New search for: Kruszewski, Piotr
    New search for: Leszczyński, Mike
    New search for: Krysko, Marcin
    New search for: Michon, Adrien
    New search for: Cordier, Yvon
    New search for: Cora, Ildiko
    New search for: Pecz, Bela
    New search for: Gargouri, Hassan
    New search for: Nigro, Raffaella Lo

    Access

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    Order at Subito €

    Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

    New search for: Schilirò, Emanuela
    New search for: Giannazzo, Filippo
    New search for: Bongiorno, Corrado
    New search for: Di Franco, Salvatore
    New search for: Greco, Giuseppe
    New search for: Roccaforte, Fabrizio
    New search for: Prystawko, Pawel
    New search for: Kruszewski, Piotr
    New search for: Leszczyński, Mike
    New search for: Krysko, Marcin
    New search for: Michon, Adrien
    New search for: Cordier, Yvon
    New search for: Cora, Ildiko
    New search for: Pecz, Bela
    New search for: Gargouri, Hassan
    New search for: Nigro, Raffaella Lo

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    Title:

    Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

    Contributors:

    Schilirò, Emanuela (author) / Giannazzo, Filippo (author) / Bongiorno, Corrado (author) / Di Franco, Salvatore (author) / Greco, Giuseppe (author) / Roccaforte, Fabrizio (author) / Prystawko, Pawel (author) / Kruszewski, Piotr (author) / Leszczyński, Mike (author) / Krysko, Marcin (author)

    Published in:

    Materials science in semiconductor processing ; 97 ; 35-39

    Publication date:

    2019-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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