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Structural study of MgO and Mg-doped ZnO thin films grown by atomic layer deposition
Structural study of MgO and Mg-doped ZnO thin films grown by atomic layer deposition
Structural study of MgO and Mg-doped ZnO thin films grown by atomic layer deposition
Cora, Ildikó (author) / Baji, Zsófia (author) / Fogarassy, Zsolt (author) / Szabó, Zoltán (author) / Pécz, Béla (author)
Materials science in semiconductor processing ; 93 ; 6-11
2019-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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