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Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films
Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films
Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films
Tao, Jiajia (author) / Lu, Hong-Liang (author) / Gu, Yang (author) / Ma, Hong-Ping (author) / Li, Xing (author) / Chen, Jin-Xin (author) / Liu, Wen-Jun (author) / Zhang, Hao (author) / Feng, Ji-Jun (author)
Applied surface science ; 476 ; 733-740
2019-01-01
8 pages
Article (Journal)
English
DDC:
620.44
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