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Electrical characterization of defects introduced during sputter deposition of tungsten on n type 4H-SiC

Tunhuma, Shandirai M. / Auret, F.D. / Legodi, M.J. / Nel, J. / Diale, M.

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Electrical characterization of defects introduced during sputter deposition of tungsten on n type 4H-SiC

Tunhuma, Shandirai M. / Auret, F.D. / Legodi, M.J. / Nel, J. / Diale, M.

Electrical characterization of defects introduced during sputter deposition of tungsten on n type 4H-SiC

Tunhuma, Shandirai M. / Auret, F.D. / Legodi, M.J. / Nel, J. / Diale, M.

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Check availability in my library

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Document information

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Document information

Title:

Electrical characterization of defects introduced during sputter deposition of tungsten on n type 4H-SiC

Contributors:

Tunhuma, Shandirai M. (author) / Auret, F.D. (author) / Legodi, M.J. (author) / Nel, J. (author) / Diale, M. (author)

Published in:

Materials science in semiconductor processing ; 81 ; 122-126

Publication date:

2018-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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