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    Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature

    New search for: Abbas, Qasim
    New search for: Liang, Hongwei
    New search for: Shi, Jianjun
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    New search for: Ahmad, Aqrab ul
    New search for: Liu, Jianxun
    New search for: Du, Guotong

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    Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature

    New search for: Abbas, Qasim
    New search for: Liang, Hongwei
    New search for: Shi, Jianjun
    New search for: Chen, Yuanpeng
    New search for: Xia, Xiaochuan
    New search for: Ahmad, Aqrab ul
    New search for: Liu, Jianxun
    New search for: Du, Guotong

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature

    New search for: Abbas, Qasim
    New search for: Liang, Hongwei
    New search for: Shi, Jianjun
    New search for: Chen, Yuanpeng
    New search for: Xia, Xiaochuan
    New search for: Ahmad, Aqrab ul
    New search for: Liu, Jianxun
    New search for: Du, Guotong

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Growth and characterization of amorphous boron nitride dielectric films on Si via RF sputtering at room temperature

    Contributors:

    Abbas, Qasim (author) / Liang, Hongwei (author) / Shi, Jianjun (author) / Chen, Yuanpeng (author) / Xia, Xiaochuan (author) / Ahmad, Aqrab ul (author) / Liu, Jianxun (author) / Du, Guotong (author)

    Published in:

    MATERIALS LETTERS ; 227 ; 284-288

    Publication date:

    2018-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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