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Piezoelectric element, method for manufacturing piezoelectric element, and electronic apparatus
A piezoelectric element includes a piezoelectric material portion. The piezoelectric material portion is made of a piezoelectric ceramic that includes a perovskite-type metal oxide including barium titanate and Mn and that has residual polarization. The piezoelectric material portion has a measurement surface extending in a direction that crosses a direction of the residual polarization of the piezoelectric ceramic, and, after the measurement surface has been polished to have a surface roughness of 200 nm or less, the measurement surface has a (002)/(200) X-ray diffraction intensity ratio of 1.0 or more at room temperature. A ratio c/a of a c-axis lattice constant c to an a-axis lattice constant a of the piezoelectric ceramic at room temperature satisfies 1.004!<=c/a!<=1.010. A half-width of a (002) diffraction peak of the measurement surface at room temperature is 1.2 DEG or less.
Piezoelectric element, method for manufacturing piezoelectric element, and electronic apparatus
A piezoelectric element includes a piezoelectric material portion. The piezoelectric material portion is made of a piezoelectric ceramic that includes a perovskite-type metal oxide including barium titanate and Mn and that has residual polarization. The piezoelectric material portion has a measurement surface extending in a direction that crosses a direction of the residual polarization of the piezoelectric ceramic, and, after the measurement surface has been polished to have a surface roughness of 200 nm or less, the measurement surface has a (002)/(200) X-ray diffraction intensity ratio of 1.0 or more at room temperature. A ratio c/a of a c-axis lattice constant c to an a-axis lattice constant a of the piezoelectric ceramic at room temperature satisfies 1.004!<=c/a!<=1.010. A half-width of a (002) diffraction peak of the measurement surface at room temperature is 1.2 DEG or less.
Piezoelectric element, method for manufacturing piezoelectric element, and electronic apparatus
HAYASHI JUMPEI (author) / IFUKU TOSHIHIRO (author) / YABUTA HISATO (author) / SHIMIZU YASUSHI (author)
2015-07-29
Patent
Electronic Resource
English
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