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High-density ITO target preparation method
The invention relates to a high-density ITO target preparation method, which is characterized in that indium-tin oxide powder prepared through a chemical co-precipitation method is adopted as a raw material, a sintering agent comprising a metal oxide, a phosphoric acid compound or phosphorus oxide and nanometer SiO2 is added, a pressure filtration molding method is used to prepare a billet, and sintering is performed at a temperature of 1450-1550 DEG C in an oxygen atmosphere to obtain the ITO target with the relative density of 98.6-99.6% and the bending strength of 112-158 MPa, wherein the thermal insulation time is 3-10 h. With the method of the present invention, the problems of small strength, poor uniformity, easy deformation and easy cracking of the current ITO are solved, and the method is suitable for preparation of the large-size and high-density ITO target.
High-density ITO target preparation method
The invention relates to a high-density ITO target preparation method, which is characterized in that indium-tin oxide powder prepared through a chemical co-precipitation method is adopted as a raw material, a sintering agent comprising a metal oxide, a phosphoric acid compound or phosphorus oxide and nanometer SiO2 is added, a pressure filtration molding method is used to prepare a billet, and sintering is performed at a temperature of 1450-1550 DEG C in an oxygen atmosphere to obtain the ITO target with the relative density of 98.6-99.6% and the bending strength of 112-158 MPa, wherein the thermal insulation time is 3-10 h. With the method of the present invention, the problems of small strength, poor uniformity, easy deformation and easy cracking of the current ITO are solved, and the method is suitable for preparation of the large-size and high-density ITO target.
High-density ITO target preparation method
LUO SHULI (author) / WANG JIANTANG (author) / LI QINGFENG (author) / LUO RUHE (author) / LUO RUTIAN (author) / LUO SHENGHUA (author) / LUO SHENGLEI (author) / CAO LIJIANG (author) / WANG FENGLEI (author) / LI LINA (author)
2015-09-16
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
| European Patent Office | 2023
High-density target material and preparation method thereof
| European Patent Office | 2023