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Niobium oxide rotating target and preparing method of niobium oxide rotating target
The invention discloses a niobium oxide rotating target with the density being greater than or equal to 4.5g/cm<3> and with the resistivity being smaller than or equal to 2.0*10<-3> ohm*cm. A preparing method of the niobium oxide rotating target comprises the steps of (1) powder preparation: uniformly mixing niobium oxide powder and metal niobium powder, and finely grinding the powder at the rotating speed being 2000 to 6000rpm for 3 to 10 hours; (2) powder roasting: performing vacuum roasting on the mixed powder finely ground in the first step; (3) granulation: carrying out granulation processing and drying processing on powder sintered in the second step; (4) cold isopressing forming: performing cold isopressing forming on powder dried in the third step at 200 to 300MPa; (5) atmosphere sintering: carrying out atmosphere sintering processing on biscuits obtained through cold isopressing forming in the fourth step in an atmosphere sintering furnace; (6) target blank fine processing: cooling a target blank subjected to sintering processing in the fifth step to the room temperature, processing fine processing on the target blank according to the required dimension, and obtaining the niobium oxide rotating target. The preparing method has the characteristics that the processing process is simple, and the production efficiency is high.
Niobium oxide rotating target and preparing method of niobium oxide rotating target
The invention discloses a niobium oxide rotating target with the density being greater than or equal to 4.5g/cm<3> and with the resistivity being smaller than or equal to 2.0*10<-3> ohm*cm. A preparing method of the niobium oxide rotating target comprises the steps of (1) powder preparation: uniformly mixing niobium oxide powder and metal niobium powder, and finely grinding the powder at the rotating speed being 2000 to 6000rpm for 3 to 10 hours; (2) powder roasting: performing vacuum roasting on the mixed powder finely ground in the first step; (3) granulation: carrying out granulation processing and drying processing on powder sintered in the second step; (4) cold isopressing forming: performing cold isopressing forming on powder dried in the third step at 200 to 300MPa; (5) atmosphere sintering: carrying out atmosphere sintering processing on biscuits obtained through cold isopressing forming in the fourth step in an atmosphere sintering furnace; (6) target blank fine processing: cooling a target blank subjected to sintering processing in the fifth step to the room temperature, processing fine processing on the target blank according to the required dimension, and obtaining the niobium oxide rotating target. The preparing method has the characteristics that the processing process is simple, and the production efficiency is high.
Niobium oxide rotating target and preparing method of niobium oxide rotating target
ZHANG SHICUI (author) / SUN ZHENDE (author)
2015-10-07
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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