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Niobium oxide plane target preparation method and niobium oxide plane target
The present invention discloses a niobium oxide plane target preparation method, which comprises: 1) powder preparation: uniformly mixing niobium oxide powder and metal niobium powder, and grinding the powder mixture to achieve the particle size of 50-200 nm; 2) powder calcining: carrying out vacuum calcining on the grinded powder mixture obtained in the step 1); 3) granulation: carrying out a granulation treatment on the calcined powder mixture in the step 2 and carrying out a drying treatment; 4) molding: pre-molding the dried powder in the step 3) under 20-70 MPa, and carrying out cold isostatic pressing molding on the pre-molded billet under 200-300 MPa; 5) atmosphere sintering: carrying out an atmosphere sintering treatment on the billet obtained in the step 4) in an atmosphere sintering furnace; and 6) target billet fine processing: cooling the sintered target billet obtained in the step 5) to a room temperature, and carrying out fine processing on the target billet according to the desired size so as to obtain the niobium oxide plane target. The preparation method of the present invention has characteristics of simple preparation process and high production efficiency.
Niobium oxide plane target preparation method and niobium oxide plane target
The present invention discloses a niobium oxide plane target preparation method, which comprises: 1) powder preparation: uniformly mixing niobium oxide powder and metal niobium powder, and grinding the powder mixture to achieve the particle size of 50-200 nm; 2) powder calcining: carrying out vacuum calcining on the grinded powder mixture obtained in the step 1); 3) granulation: carrying out a granulation treatment on the calcined powder mixture in the step 2 and carrying out a drying treatment; 4) molding: pre-molding the dried powder in the step 3) under 20-70 MPa, and carrying out cold isostatic pressing molding on the pre-molded billet under 200-300 MPa; 5) atmosphere sintering: carrying out an atmosphere sintering treatment on the billet obtained in the step 4) in an atmosphere sintering furnace; and 6) target billet fine processing: cooling the sintered target billet obtained in the step 5) to a room temperature, and carrying out fine processing on the target billet according to the desired size so as to obtain the niobium oxide plane target. The preparation method of the present invention has characteristics of simple preparation process and high production efficiency.
Niobium oxide plane target preparation method and niobium oxide plane target
ZHANG SHICUI (author) / SUN ZHENDE (author)
2015-10-14
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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