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Preparation method and application of niobium oxide target material
The invention provides a preparation method and application of a niobium oxide target material, and the preparation method comprises the following steps: (1) mixing niobium pentoxide powder and a polyvinyl alcohol binder, and carrying out spray granulation to obtain a mixture; (2) carrying out cold pressing treatment on the mixture to obtain a green body; and (3) carrying out oxygen-loss pressureless sintering on the green body in a hydrogen atmosphere, and machining to obtain the niobium oxide target material. The preparation method is easy to operate, the niobium oxide green body is subjected to oxygen-loss pressureless sintering under specific conditions in the hydrogen atmosphere, the tantalum molybdenum oxide sputtering target material high in density and excellent in conductivity is obtained, and the tantalum molybdenum oxide sputtering target material is suitable for large-scale application and popularization.
本发明提供一种氧化铌靶材的制备方法及用途，所述制备方法包括如下步骤：(1)混合五氧化二铌粉末和聚乙烯醇粘结剂，经喷雾造粒得到混合料；(2)所述混合料经冷压处理，得到生坯；(3)将所述生坯在氢气氛围中进行失氧无压烧结后，经机加工，得到氧化铌靶材。本发明所述制备方法操作简单，将氧化铌生坯在氢气氛围中进行特定条件的失氧无压烧结，得到了致密度高且导电性能优异的氧化钼钽溅射靶材，适合大规模推广应用。
Preparation method and application of niobium oxide target material
The invention provides a preparation method and application of a niobium oxide target material, and the preparation method comprises the following steps: (1) mixing niobium pentoxide powder and a polyvinyl alcohol binder, and carrying out spray granulation to obtain a mixture; (2) carrying out cold pressing treatment on the mixture to obtain a green body; and (3) carrying out oxygen-loss pressureless sintering on the green body in a hydrogen atmosphere, and machining to obtain the niobium oxide target material. The preparation method is easy to operate, the niobium oxide green body is subjected to oxygen-loss pressureless sintering under specific conditions in the hydrogen atmosphere, the tantalum molybdenum oxide sputtering target material high in density and excellent in conductivity is obtained, and the tantalum molybdenum oxide sputtering target material is suitable for large-scale application and popularization.
本发明提供一种氧化铌靶材的制备方法及用途，所述制备方法包括如下步骤：(1)混合五氧化二铌粉末和聚乙烯醇粘结剂，经喷雾造粒得到混合料；(2)所述混合料经冷压处理，得到生坯；(3)将所述生坯在氢气氛围中进行失氧无压烧结后，经机加工，得到氧化铌靶材。本发明所述制备方法操作简单，将氧化铌生坯在氢气氛围中进行特定条件的失氧无压烧结，得到了致密度高且导电性能优异的氧化钼钽溅射靶材，适合大规模推广应用。
Preparation method and application of niobium oxide target material
一种氧化铌靶材的制备方法及用途
YAO LIJUN (author) / PAN JIE (author) / WU DONGQING (author) / HUANG JIEWEN (author)
2023-09-29
Patent
Electronic Resource
Chinese
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