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Preparation method of aluminum and titanium doped zinc oxide target material
The invention belongs to the field of transparent conducting film preparation, and particularly relates to an aluminum and titanium doped zinc oxide target material and a preparation method thereof. The invention aims at solving the technical problems that a blank prepared through an existing technology is prone to cracking, a large-size flat slab blank is prone to crimping in the shrinkage process, and frequently-used monomers have toxicity. In order to solve the technical problems, the invention provides a preparation method of the aluminum and titanium doped zinc oxide target material. The method comprises the following steps that 1, aluminum oxide, titanium dioxide and zinc oxide are evenly dispersed into water, and slurry is obtained through mixing ball milling; 2, MAM and PEGDMA are dispersed into the slurry; 3, a catalyst and an initiator are added to the slurry, and defoaming is conducted through absolute ethyl alcohol; 4, the defoamed slurry is injected into a nonporous mold, and an aluminum and titanium doped zinc oxide target material blank is obtained after drying is conducted; 5, the aluminum and titanium doped zinc oxide target material blank is sintered, and the aluminum and titanium doped zinc oxide target material is obtained. The method is easy to carry out, parts with complex shapes can be prepared, and the prepared parts are high in density, low in resistivity and high in bending strength.
Preparation method of aluminum and titanium doped zinc oxide target material
The invention belongs to the field of transparent conducting film preparation, and particularly relates to an aluminum and titanium doped zinc oxide target material and a preparation method thereof. The invention aims at solving the technical problems that a blank prepared through an existing technology is prone to cracking, a large-size flat slab blank is prone to crimping in the shrinkage process, and frequently-used monomers have toxicity. In order to solve the technical problems, the invention provides a preparation method of the aluminum and titanium doped zinc oxide target material. The method comprises the following steps that 1, aluminum oxide, titanium dioxide and zinc oxide are evenly dispersed into water, and slurry is obtained through mixing ball milling; 2, MAM and PEGDMA are dispersed into the slurry; 3, a catalyst and an initiator are added to the slurry, and defoaming is conducted through absolute ethyl alcohol; 4, the defoamed slurry is injected into a nonporous mold, and an aluminum and titanium doped zinc oxide target material blank is obtained after drying is conducted; 5, the aluminum and titanium doped zinc oxide target material blank is sintered, and the aluminum and titanium doped zinc oxide target material is obtained. The method is easy to carry out, parts with complex shapes can be prepared, and the prepared parts are high in density, low in resistivity and high in bending strength.
Preparation method of aluminum and titanium doped zinc oxide target material
MA LAN (author) / WANG LI (author) / ZOU MENG (author) / WANG XINLIN (author) / WANG CONGZHEN (author) / LIU XIAOMIN (author) / TANG KAIMEI (author) / CAI DAN (author) / JIANG BIRU (author) / DU YAN (author)
2016-01-27
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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