A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Target material manufacturing method and target material
The invention provides a target material manufacturing method and a target material, wherein the target material manufacturing method comprises the steps: grinding and mixing a zinc oxide base material and a yttrium oxide base material; in the grinding and mixing process, adding a dispersing agent and water; adding a binder into the mixed solution after mixing, and stirring to obtain slurry; performing spray granulation on the slurry to obtain granules; shaping the granules to obtain a biscuit; and sintering the biscuit to obtain the target material. The target material manufacturing method, comprises the steps that the zinc oxide base material and the yttrium oxide base material are ground and mixed, the dispersing agent and water are added, the binder is added, and full stirring is carried out to obtain slurry, the slurry is subjected to spray granulation to obtain the granules, the granules are shaped according to preset shape to obtain the biscuit, and the biscuit is sintered to obtain the target material; through mixing of zinc oxide and yttrium oxide, the compactness of the target material is improved and the adhesive force of a thin film can be improved; and the manufacturing method is simple in production process and suitable for industrial production.
本发明提出了一种靶材的制造方法和靶材，其中，靶材的制造方法包括：将氧化锌基材与氧化钇基材进行研磨混合；在研磨混合的过程中，加入分散剂与水；在混合后的混合液中加入粘结剂并搅拌，得到浆料；将浆料进行喷雾造粒，得到粒料；将粒料定型，得到素坯；对素坯进行烧结，得到靶材。本发明提出的靶材的制造方法，将氧化锌基材与氧化钇基材研磨混合，并加入分散剂与水，再加入粘结剂，经充分搅拌后得到浆料，对浆料进行喷雾造粒，得到粒料，将粒料按预设形状定型，得到素坯，将素坯烧结，得到靶材，通过氧化锌与氧化钇的混合，进而提升靶材的致密性，并能够提升薄膜的附着力，且生产工艺简单，适于工业化生产。
Target material manufacturing method and target material
The invention provides a target material manufacturing method and a target material, wherein the target material manufacturing method comprises the steps: grinding and mixing a zinc oxide base material and a yttrium oxide base material; in the grinding and mixing process, adding a dispersing agent and water; adding a binder into the mixed solution after mixing, and stirring to obtain slurry; performing spray granulation on the slurry to obtain granules; shaping the granules to obtain a biscuit; and sintering the biscuit to obtain the target material. The target material manufacturing method, comprises the steps that the zinc oxide base material and the yttrium oxide base material are ground and mixed, the dispersing agent and water are added, the binder is added, and full stirring is carried out to obtain slurry, the slurry is subjected to spray granulation to obtain the granules, the granules are shaped according to preset shape to obtain the biscuit, and the biscuit is sintered to obtain the target material; through mixing of zinc oxide and yttrium oxide, the compactness of the target material is improved and the adhesive force of a thin film can be improved; and the manufacturing method is simple in production process and suitable for industrial production.
本发明提出了一种靶材的制造方法和靶材，其中，靶材的制造方法包括：将氧化锌基材与氧化钇基材进行研磨混合；在研磨混合的过程中，加入分散剂与水；在混合后的混合液中加入粘结剂并搅拌，得到浆料；将浆料进行喷雾造粒，得到粒料；将粒料定型，得到素坯；对素坯进行烧结，得到靶材。本发明提出的靶材的制造方法，将氧化锌基材与氧化钇基材研磨混合，并加入分散剂与水，再加入粘结剂，经充分搅拌后得到浆料，对浆料进行喷雾造粒，得到粒料，将粒料按预设形状定型，得到素坯，将素坯烧结，得到靶材，通过氧化锌与氧化钇的混合，进而提升靶材的致密性，并能够提升薄膜的附着力，且生产工艺简单，适于工业化生产。
Target material manufacturing method and target material
靶材的制造方法和靶材
LEI YU (author) / XIAO SHIHONG (author) / ZHOU ZHAOYU (author) / ZHAO MINGZENG (author) / WANG ZHENGJUN (author) / YANG YONGTIAN (author) / HE QINGQING (author)
2020-04-17
Patent
Electronic Resource
Chinese
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