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Method for co-firing metal and silicon nitride ceramic high-temperature composite substrate
The invention discloses a method for high-temperature co-firing of a composite substrate by metal and silicon nitride ceramic, and the method comprises multilayer ceramic, a silicon nitride ceramic green film and tungsten-molybdenum slurry; the process comprises a high-temperature sintering process, a multilayer ceramic production process, a silk-screen printing process, a laminating process, a slicing process and a production process; and the device comprises a rubber discharging furnace and an atmosphere air pressure sintering furnace. The production process of the silicon nitride ceramic green body membrane comprises the following steps: mixing the following materials in percentage by weight: 4-7% of yttrium oxide, 4-8% of binder, 5-8% of plasticizer, 5-8% of leveling agent and the balance of silicon nitride ceramic powder, wherein the above materials are mixed to form a green body membrane, and the green body membrane is put into a nitrogen atmosphere for discharging glue, so a silicon nitride ceramic green film is formed; The method for co-firing the metal and the silicon nitride ceramic into the composite substrate at high temperature has the advantages that the metal and the silicon nitride ceramic with high thermal conductivity are co-fired at high temperature, and the bending strength is good.
本发明公开了一种金属和氮化硅陶瓷高温共烧复合基板的方法，包括多层陶瓷、氮化硅陶瓷生坯膜和钨钼浆料，工艺包括高温烧结工艺、多层陶瓷生产工艺、丝网印刷工艺、叠压工艺、切片工艺和生产工艺，器件包括：排胶炉和气氛气压烧结炉，氮化硅陶瓷生坯膜生产工艺包括：氮化硅陶瓷粉、助烧剂氧化钇、粘结剂、流平剂和增塑剂，重量比为氧化钇占总重量的4%～7%、粘结剂占总重量的4%～8%、增塑剂和流平剂占总重量的5%～8%，其余为氮化硅陶瓷粉体，将上述材料混合成生胚膜放入氮气气氛中排胶，制得氮化硅陶瓷生坯膜；本发明一种金属和氮化硅陶瓷高温共烧复合基板的方法具有高温共烧出高热导的金属和氮化硅陶瓷、抗弯强度好的优点。
Method for co-firing metal and silicon nitride ceramic high-temperature composite substrate
The invention discloses a method for high-temperature co-firing of a composite substrate by metal and silicon nitride ceramic, and the method comprises multilayer ceramic, a silicon nitride ceramic green film and tungsten-molybdenum slurry; the process comprises a high-temperature sintering process, a multilayer ceramic production process, a silk-screen printing process, a laminating process, a slicing process and a production process; and the device comprises a rubber discharging furnace and an atmosphere air pressure sintering furnace. The production process of the silicon nitride ceramic green body membrane comprises the following steps: mixing the following materials in percentage by weight: 4-7% of yttrium oxide, 4-8% of binder, 5-8% of plasticizer, 5-8% of leveling agent and the balance of silicon nitride ceramic powder, wherein the above materials are mixed to form a green body membrane, and the green body membrane is put into a nitrogen atmosphere for discharging glue, so a silicon nitride ceramic green film is formed; The method for co-firing the metal and the silicon nitride ceramic into the composite substrate at high temperature has the advantages that the metal and the silicon nitride ceramic with high thermal conductivity are co-fired at high temperature, and the bending strength is good.
本发明公开了一种金属和氮化硅陶瓷高温共烧复合基板的方法，包括多层陶瓷、氮化硅陶瓷生坯膜和钨钼浆料，工艺包括高温烧结工艺、多层陶瓷生产工艺、丝网印刷工艺、叠压工艺、切片工艺和生产工艺，器件包括：排胶炉和气氛气压烧结炉，氮化硅陶瓷生坯膜生产工艺包括：氮化硅陶瓷粉、助烧剂氧化钇、粘结剂、流平剂和增塑剂，重量比为氧化钇占总重量的4%～7%、粘结剂占总重量的4%～8%、增塑剂和流平剂占总重量的5%～8%，其余为氮化硅陶瓷粉体，将上述材料混合成生胚膜放入氮气气氛中排胶，制得氮化硅陶瓷生坯膜；本发明一种金属和氮化硅陶瓷高温共烧复合基板的方法具有高温共烧出高热导的金属和氮化硅陶瓷、抗弯强度好的优点。
Method for co-firing metal and silicon nitride ceramic high-temperature composite substrate
一种金属和氮化硅陶瓷高温共烧复合基板的方法
YU LIXUE (author) / ZOU WENGE (author) / LI PINGQI (author) / WANG MEILING (author)
2021-04-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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