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AZO target material and preparation method thereof
The invention provides a preparation method of an AZO target material, and belongs to the technical field of photoelectric materials.The preparation method comprises the steps that nano-zinc oxide, nano-aluminum oxide and a binder are sequentially mixed and granulated, and granules are obtained; carrying out 3D printing molding on the granules to obtain an AZO biscuit; and the AZO biscuit is sintered, and the AZO target material is obtained. The AZO target material provided by the invention is uniform in structure, high in relative density and simple in preparation method through 3D printing forming and sintering control procedures.
本发明提供了一种AZO靶材的制备方法,属于光电材料技术领域,本发明将纳米氧化锌、纳米氧化铝和粘结剂依次混合和制粒,得到颗粒料;将颗粒料进行3D打印成型,得到AZO素坯;将所述AZO素坯进行烧结,得到AZO靶材。本发明通过3D打印成型及控制烧结程序,使本发明提供的AZO靶材结构均匀、相对密度高、制备方法简单。
AZO target material and preparation method thereof
The invention provides a preparation method of an AZO target material, and belongs to the technical field of photoelectric materials.The preparation method comprises the steps that nano-zinc oxide, nano-aluminum oxide and a binder are sequentially mixed and granulated, and granules are obtained; carrying out 3D printing molding on the granules to obtain an AZO biscuit; and the AZO biscuit is sintered, and the AZO target material is obtained. The AZO target material provided by the invention is uniform in structure, high in relative density and simple in preparation method through 3D printing forming and sintering control procedures.
本发明提供了一种AZO靶材的制备方法,属于光电材料技术领域,本发明将纳米氧化锌、纳米氧化铝和粘结剂依次混合和制粒,得到颗粒料;将颗粒料进行3D打印成型,得到AZO素坯;将所述AZO素坯进行烧结,得到AZO靶材。本发明通过3D打印成型及控制烧结程序,使本发明提供的AZO靶材结构均匀、相对密度高、制备方法简单。
AZO target material and preparation method thereof
一种AZO靶材及其制备方法
HAO ZHENHUA (author) / SUN BENSHUANG (author) / MO ZHE (author) / LIU YANG (author) / SHU YONGCHUN (author) / CHEN JIE (author) / ZENG XUEYUN (author)
2022-03-25
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
B33Y
ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
,
Additive (generative) Fertigung, d. h. die Herstellung von dreidimensionalen [3D] Bauteilen durch additive Abscheidung, additive Agglomeration oder additive Schichtung, z. B. durch 3D- Drucken, Stereolithografie oder selektives Lasersintern
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL