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A platform for research: civil engineering, architecture and urbanism
AZO target material and preparation method thereof
The invention relates to an AZO target material and a preparation method thereof, and belongs to the technical field of photoelectric materials, and the preparation method comprises the following steps: mixing aluminum zinc oxide powder, a premixed solution and a dispersing agent, ball-milling after mixing, adding an initiator and a catalyst after mixing, pouring into a mold, and curing to obtain a green body; carrying out glue removal on the obtained green body; according to the AZO target material and the preparation method thereof, sintering is carried out under the inert gas atmosphere, the oxygen partial pressure in the sintering process is improved, oxygen release is reduced, and loss in the sintering process is reduced. The dispersing agent prepared in the invention belongs to a cellulose dispersing agent, is prepared by reaction of epoxy quaternary ammonium salt and hemicellulose, interacts with the aluminum zinc oxide powder, is adsorbed on the surface of the aluminum zinc oxide powder to increase the dispersing effect, and is matched with a sintering environment to improve the product quality.
本发明涉及一种AZO靶材及其制备方法，属于光电材料技术领域，包括如下步骤：将氧化锌铝粉体、预混液和分散剂混合，混合后经过球磨，混合好后加入引发剂和催化剂，倒入模具中固化，固化后得到坯体；将得到的坯体进行排胶；排胶后，在惰性气体氛围下进行烧结，得到一种AZO靶材，本发明中通过在惰性气体下进行烧结，提高烧结过程的氧分压，减少氧气的释放，减少烧结过程中的损失。本发明中制备的分散剂属于纤维素类分散剂，由环氧季铵盐与半纤维素反应制备而成，该分散剂与氧化锌铝粉体之间相互作用，吸附在氧化锌铝粉体表面，增加其分散效果，配合烧结环境提高产品质量。
AZO target material and preparation method thereof
The invention relates to an AZO target material and a preparation method thereof, and belongs to the technical field of photoelectric materials, and the preparation method comprises the following steps: mixing aluminum zinc oxide powder, a premixed solution and a dispersing agent, ball-milling after mixing, adding an initiator and a catalyst after mixing, pouring into a mold, and curing to obtain a green body; carrying out glue removal on the obtained green body; according to the AZO target material and the preparation method thereof, sintering is carried out under the inert gas atmosphere, the oxygen partial pressure in the sintering process is improved, oxygen release is reduced, and loss in the sintering process is reduced. The dispersing agent prepared in the invention belongs to a cellulose dispersing agent, is prepared by reaction of epoxy quaternary ammonium salt and hemicellulose, interacts with the aluminum zinc oxide powder, is adsorbed on the surface of the aluminum zinc oxide powder to increase the dispersing effect, and is matched with a sintering environment to improve the product quality.
本发明涉及一种AZO靶材及其制备方法，属于光电材料技术领域，包括如下步骤：将氧化锌铝粉体、预混液和分散剂混合，混合后经过球磨，混合好后加入引发剂和催化剂，倒入模具中固化，固化后得到坯体；将得到的坯体进行排胶；排胶后，在惰性气体氛围下进行烧结，得到一种AZO靶材，本发明中通过在惰性气体下进行烧结，提高烧结过程的氧分压，减少氧气的释放，减少烧结过程中的损失。本发明中制备的分散剂属于纤维素类分散剂，由环氧季铵盐与半纤维素反应制备而成，该分散剂与氧化锌铝粉体之间相互作用，吸附在氧化锌铝粉体表面，增加其分散效果，配合烧结环境提高产品质量。
AZO target material and preparation method thereof
一种AZO靶材及其制备方法
TANG ANTAI (author)
2022-07-29
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME