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A platform for research: civil engineering, architecture and urbanism
AZO target material and preparation method thereof
The invention discloses an AZO target material and a preparation method thereof, and relates to the technical field of target materials, the AZO target material comprises the following preparation raw materials by weight: 10 parts of zinc oxide, 5-8 parts of alumina, 0.5-0.8 part of modified ITO and 0.4-0.5 part of carboxymethyl cellulose; the modified ITO is prepared from the following raw materials in parts by weight: 10 parts of yttrium oxide, 1 to 2 parts of lanthanum oxide, 0.3 to 0.5 part of chitosan, 0.4 to 1 part of polydopamine modified carbon nanotubes and 80 to 90 parts of ITO. The target material is low in resistance and good in light transmittance.
本发明公开了一种AZO靶材及其制备方法，涉及靶材技术领域，包括以下重量份数的制备原料：氧化锌10份、氧化铝5份～8份、改性ITO 0.5份～0.8份和羧甲基纤维素0.4份～0.5份；改性ITO包括以下制备原料：10份氧化钇、1份～2份氧化镧、0.3份～0.5份壳聚糖、0.4份～1份聚多巴胺改性碳纳米管和80份～90份ITO。本发明靶材的电阻低且透光度好。
AZO target material and preparation method thereof
The invention discloses an AZO target material and a preparation method thereof, and relates to the technical field of target materials, the AZO target material comprises the following preparation raw materials by weight: 10 parts of zinc oxide, 5-8 parts of alumina, 0.5-0.8 part of modified ITO and 0.4-0.5 part of carboxymethyl cellulose; the modified ITO is prepared from the following raw materials in parts by weight: 10 parts of yttrium oxide, 1 to 2 parts of lanthanum oxide, 0.3 to 0.5 part of chitosan, 0.4 to 1 part of polydopamine modified carbon nanotubes and 80 to 90 parts of ITO. The target material is low in resistance and good in light transmittance.
本发明公开了一种AZO靶材及其制备方法，涉及靶材技术领域，包括以下重量份数的制备原料：氧化锌10份、氧化铝5份～8份、改性ITO 0.5份～0.8份和羧甲基纤维素0.4份～0.5份；改性ITO包括以下制备原料：10份氧化钇、1份～2份氧化镧、0.3份～0.5份壳聚糖、0.4份～1份聚多巴胺改性碳纳米管和80份～90份ITO。本发明靶材的电阻低且透光度好。
AZO target material and preparation method thereof
一种AZO靶材及其制备方法
TANG ANTAI (author) / TANG ZHIYONG (author) / CHENG BO (author)
2023-10-31
Patent
Electronic Resource
Chinese