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Preparation method of oxide target material
The invention provides a preparation method of an oxide target material, which comprises the following steps: mixing and ball-milling a plurality of different metal oxide powders, and adding an ultrasonic technology in the ball-milling process to obtain a metal oxide mixed slurry 1; then adding a binder into the mixed slurry 1, then carrying out ball milling again, adding an ultrasonic technology in the ball milling process, and carrying out a refining dispersion process to obtain mixed slurry 2; the mixed slurry 2 is injected into a mold for molding, a green body is obtained after demolding, finally, the green body is sequentially dried, degreased and sintered, and the high-quality oxide target material is obtained. An ultrasonic technology is added in the ball-milling process, agglomerated particles in the ball-milling process are further scattered by utilizing high energy of ultrasonic waves, and the problem of non-uniform mixing in the ball-milling process is effectively solved; in the dispersion process, ball milling and ultrasonic refining dispersion processes are utilized, so that the particle size distribution of the mixed slurry is uniform, and the mixed slurry has high compactness. Therefore, the prepared oxide target material is uniform in component, high in compactness and good in performance.
本发明提供一种氧化物靶材制备方法，先将多种不同的金属氧化物粉进行混合球磨，同时在球磨过程中加入超声技术，获得金属氧化物混合浆料1；然后将粘结剂加入到混合浆料1中后再次进行球磨，球磨过程中加入超声技术，细化分散过程，得到混合浆料2；将混合浆料2注入模具中进行成型，脱模后得到生坯，最后对生坯依次进行干燥、脱脂和烧结，得到高质量氧化物靶材；本发明在球磨过程中加入超声技术，利用超声波的高能量，进一步打散球磨过程中的团聚颗粒，有效解决球磨过程中混合不均匀的问题；在分散过程中利用球磨和超声波细化分散过程，使混合浆料粒径分布均匀，具有高的致密性。因此，本发明制备的氧化物靶材成分均匀，致密性高，性能好。
Preparation method of oxide target material
The invention provides a preparation method of an oxide target material, which comprises the following steps: mixing and ball-milling a plurality of different metal oxide powders, and adding an ultrasonic technology in the ball-milling process to obtain a metal oxide mixed slurry 1; then adding a binder into the mixed slurry 1, then carrying out ball milling again, adding an ultrasonic technology in the ball milling process, and carrying out a refining dispersion process to obtain mixed slurry 2; the mixed slurry 2 is injected into a mold for molding, a green body is obtained after demolding, finally, the green body is sequentially dried, degreased and sintered, and the high-quality oxide target material is obtained. An ultrasonic technology is added in the ball-milling process, agglomerated particles in the ball-milling process are further scattered by utilizing high energy of ultrasonic waves, and the problem of non-uniform mixing in the ball-milling process is effectively solved; in the dispersion process, ball milling and ultrasonic refining dispersion processes are utilized, so that the particle size distribution of the mixed slurry is uniform, and the mixed slurry has high compactness. Therefore, the prepared oxide target material is uniform in component, high in compactness and good in performance.
本发明提供一种氧化物靶材制备方法，先将多种不同的金属氧化物粉进行混合球磨，同时在球磨过程中加入超声技术，获得金属氧化物混合浆料1；然后将粘结剂加入到混合浆料1中后再次进行球磨，球磨过程中加入超声技术，细化分散过程，得到混合浆料2；将混合浆料2注入模具中进行成型，脱模后得到生坯，最后对生坯依次进行干燥、脱脂和烧结，得到高质量氧化物靶材；本发明在球磨过程中加入超声技术，利用超声波的高能量，进一步打散球磨过程中的团聚颗粒，有效解决球磨过程中混合不均匀的问题；在分散过程中利用球磨和超声波细化分散过程，使混合浆料粒径分布均匀，具有高的致密性。因此，本发明制备的氧化物靶材成分均匀，致密性高，性能好。
Preparation method of oxide target material
一种氧化物靶材制备方法
CHEN HUIPENG (author) / FAN YUYANG (author) / LI XIFENG (author) / YE WEIXI (author) / LIN JIAMING (author) / CHEN GENGXU (author) / YANG QIAN (author)
2024-04-02
Patent
Electronic Resource
Chinese
Preparation method of oxide target material and praseodymium-doped IGZO oxide target material
| European Patent Office | 2024