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Plug, plug manufacturing method, and member for semiconductor manufacturing apparatus
The invention relates to a plug, a plug manufacturing method, and a member for a semiconductor manufacturing apparatus, and provides a plug which can be manufactured with high yield. The plug (50) is provided with a plug body (58), a spiral gas flow path (51), and a branch path (56). The spiral gas flow path (51) is provided inside the plug body (58) and extends from the lower surface to the upper surface of the plug body (58). The branch path (56) is provided so as to branch midway in the spiral gas flow path (51), and is open on the outer peripheral surface of the plug body (58). Helical neutrons corresponding to the helical gas flow path (51) are integrally provided in a molding die used for manufacturing the plug (50), and the helical neutrons are held on the inner peripheral surface of the molding die by means of rod-shaped neutrons corresponding to the branch paths (56). Therefore, neutron breakage can be prevented, and the plug (50) can be manufactured with high yield.
本发明涉及插塞、插塞制造方法及半导体制造装置用部件，提供能够成品率高地制造的插塞。插塞(50)具备：插塞主体(58)、螺旋状气体流路(51)以及分支路(56)。螺旋状气体流路(51)设置于插塞主体(58)的内部，从插塞主体(58)的下表面到达上表面。分支路(56)设置为在螺旋状气体流路(51)的中途分支出来，且在插塞主体(58)的外周面呈开口。制造插塞(50)时使用的成型模具中一体化地设置有与螺旋状气体流路(51)对应的螺旋状的中子，该螺旋状的中子借助与分支路(56)对应的棒状的中子而保持于成型模具的内周面。因此，能够防止中子破损，从而能够成品率高地制造插塞(50)。
Plug, plug manufacturing method, and member for semiconductor manufacturing apparatus
The invention relates to a plug, a plug manufacturing method, and a member for a semiconductor manufacturing apparatus, and provides a plug which can be manufactured with high yield. The plug (50) is provided with a plug body (58), a spiral gas flow path (51), and a branch path (56). The spiral gas flow path (51) is provided inside the plug body (58) and extends from the lower surface to the upper surface of the plug body (58). The branch path (56) is provided so as to branch midway in the spiral gas flow path (51), and is open on the outer peripheral surface of the plug body (58). Helical neutrons corresponding to the helical gas flow path (51) are integrally provided in a molding die used for manufacturing the plug (50), and the helical neutrons are held on the inner peripheral surface of the molding die by means of rod-shaped neutrons corresponding to the branch paths (56). Therefore, neutron breakage can be prevented, and the plug (50) can be manufactured with high yield.
本发明涉及插塞、插塞制造方法及半导体制造装置用部件，提供能够成品率高地制造的插塞。插塞(50)具备：插塞主体(58)、螺旋状气体流路(51)以及分支路(56)。螺旋状气体流路(51)设置于插塞主体(58)的内部，从插塞主体(58)的下表面到达上表面。分支路(56)设置为在螺旋状气体流路(51)的中途分支出来，且在插塞主体(58)的外周面呈开口。制造插塞(50)时使用的成型模具中一体化地设置有与螺旋状气体流路(51)对应的螺旋状的中子，该螺旋状的中子借助与分支路(56)对应的棒状的中子而保持于成型模具的内周面。因此，能够防止中子破损，从而能够成品率高地制造插塞(50)。
Plug, plug manufacturing method, and member for semiconductor manufacturing apparatus
插塞、插塞制造方法及半导体制造装置用部件
HASHIMOTO HIDEAKI (author) / OHNO TADASHI (author) / ASHIDA CHUDAI (author)
2024-06-21
Patent
Electronic Resource
Chinese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
B33Y
ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
,
Additive (generative) Fertigung, d. h. die Herstellung von dreidimensionalen [3D] Bauteilen durch additive Abscheidung, additive Agglomeration oder additive Schichtung, z. B. durch 3D- Drucken, Stereolithografie oder selektives Lasersintern
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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