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PREPARATION METHOD OF POLYMER-DERIVED HIGH-TEMPERATURE CERAMIC FILM SENSOR
A preparation method of a polymer-derived high-temperature ceramic thin film sensor is provided. Specifically, a sensitive layer precursor layer is prepared by spraying a sensitive layer precursor liquid on an alumina substrate, and the sensitive layer precursor liquid is obtained by mixing precursor liquid with conductive powder. A protective layer precursor liquid is prepared by spraying protective layer precursor liquid on the sensitive layer precursor layer, and the protective layer precursor liquid is obtained by mixing TiB2 nano-powder, insulating powder and the precursor liquid. The protective layer precursor layer, a solder and the sensitive layer precursor layer are simultaneously pyrolyzed by a one-time pyrolysis process, and thus a protective layer, the solder joints and the sensitive layer are obtained simultaneously. Thus, there is no need to pyrolyze the sensitive layer first, saving the time for pyrolyzing the sensitive layer.
PREPARATION METHOD OF POLYMER-DERIVED HIGH-TEMPERATURE CERAMIC FILM SENSOR
A preparation method of a polymer-derived high-temperature ceramic thin film sensor is provided. Specifically, a sensitive layer precursor layer is prepared by spraying a sensitive layer precursor liquid on an alumina substrate, and the sensitive layer precursor liquid is obtained by mixing precursor liquid with conductive powder. A protective layer precursor liquid is prepared by spraying protective layer precursor liquid on the sensitive layer precursor layer, and the protective layer precursor liquid is obtained by mixing TiB2 nano-powder, insulating powder and the precursor liquid. The protective layer precursor layer, a solder and the sensitive layer precursor layer are simultaneously pyrolyzed by a one-time pyrolysis process, and thus a protective layer, the solder joints and the sensitive layer are obtained simultaneously. Thus, there is no need to pyrolyze the sensitive layer first, saving the time for pyrolyzing the sensitive layer.
PREPARATION METHOD OF POLYMER-DERIVED HIGH-TEMPERATURE CERAMIC FILM SENSOR
CUI ZAIFU (author) / LU ZHENGUO (author) / HUANG LIWEN (author) / WANG ZHONGHAI (author) / XU ZITONG (author) / DUAN WENJIN (author) / GOU BOHUAI (author) / MAO DINGYUN (author) / CHEN XIAOJUN (author) / LI XIN (author)
2025-01-16
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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